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Join the new OSTG BBS as a member to receive the latest and greatest in new releases, announcements and other random stuff. The BBS will be in operation during the summer of 2011. This is a new and fresh BBS with a new and fresh community! We are actively recruiting members at this time. The BBS is designed to work in Mac OS X 10.5 and higher. This is a Linux OS BBS, we have not confirmed if it will work in other operating systems but will be testing the BBS to be sure. We aim for a fully functional BBS. We are currently in the process of sorting out the customizations that need to be made to the BBS to get it to a point of running with minimal errors and general lagging. If there are members out there that have Mac OS X and a 10.6.3 set of preferences, we can potentially migrate the contents of that set of preferences and use them to work out the end result. Please feel free to send an e-mail to sircae at gmail dot com if you’re interested in helping to make the BBS more efficient!
News
Saturday, 02 May 2011
PoC’s call for summer workshop
For those of you interested in attending the summer workshop, the call is open. The workshop is going to be in Tucson, Arizona. If you have not applied for the workshop yet, we highly suggest that you do so because we will not be able to accommodate everyone. Yes, I have heard the rumors that we will be running out of space in this workshop!
There are still spots left for the workshop. See the POC’s site for more info. If you are interested in attending the workshop, make sure you submit your application early, especially if you plan on staying for the entire workshop. We cannot make room for everyone, even if you register early for the workshop.
Please feel free to contact the POC’s listed on the website if you have any questions regarding attending the workshop.
We plan to use services such as Skype. We hope that all of our friends that are registered to attend the workshop will be able to stay on the forum
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The invention relates generally to a process of fabricating interconnects for an integrated circuit and more particularly to a process of filling a gap between an interconnect and a liner formed on the interconnect.
2. Description of the Prior Art
The trend in integrated circuit design is toward multiple levels of metallization, also referred to as multilevel interconnects, for improving device speed and improving the overall quality of the integrated circuit. In fabricating semiconductor devices, metal films, typically of aluminum or an aluminum alloy, are used to fill the interconnects between various metallization layers. The metal films are deposited by a number of techniques, such as sputtering, evaporation and chemical vapor deposition. After the metal films are deposited, any excess metal over the desired area is removed from the wafer to form the desired interconnect. If the spaces between the interconnects are too large, the interconnects may short-circuit during the subsequent passivation or dielectric film deposition. Therefore, it is generally desirable to reduce the space between the interconnects as much as possible. A major problem with forming densely packed interconnects is the often observed shorting between neighboring interconnects. Because of this shorting, it is often difficult to manufacture reliable integrated circuits.
Various techniques have been used to form interconnects with reduced spacing between the interconnects. A first technique is to remove the unwanted metal by chemical-mechanical polishing. However, chemical-mechanical polishing causes surface damage to the wafer which may also lead to shorting between the interconnects. An alternative process is to place a liner, or an insulation layer, on the wafer and fill the interconnects with metal and then remove excess metal by chemical-mechanical polishing. U.S. Pat. No. 5,433,852 to Ogawa et al. describes a process wherein a gap between an interconnect and a liner formed on the interconnect is filled with metal. The metal is deposited in a single metal deposition step, before removing the liner by etch-back. Etch-back requires that the liner be soluble in a suitable etchant. Also, it is desired to conduct a subsequent planarization step. As noted above, planarization or polishing of metal layers formed
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